Equipment Name

Environmental SEM with FEG

Model

Quanta FEG 250

Manufacturer

FEI

Manufacture Year

2015

Engineer in Charge

Jing Liu

Tel: 022-60216409

E-Mail: 18222861533@163.com

Location

Room 114B, Bulding 12

Configuration & Capability

1. Resolution:

     High-Vacuum Mode: 1.0 nm @ 30 kV (SE)

                                           3.0 nm @ 1 kV (SE)

                                           2.5 nm @ 30 kV (BSE)

     Low-Vacuum and Environmental Modes: 1.4 nm @ 30 kV (BSE)

2. Accelerating Voltage: 200 V ~ 30 kV

3. Probe Current: 0.8 pA ~ 100 nA

4. Injected Gases: Air, H₂O, N₂, CO₂, NO₂, Ar, C_XH_Y, etc.